SCOPUS 정보 검색 플랫폼

Volumn 6151 I, Issue , 2006, Pages

Model of Ru surface oxidation for the lifetime scaling of EUVL projection optics mirror

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL EQUATIONS; DIFFUSION; INTERFACES (MATERIALS); IRRADIATION; OXIDATION; OXYGEN; RUTHENIUM COMPOUNDS; SYNCHROTRON RADIATION;

EUVL PROJECTION OPTICS; SURFACE OXIDIZATION; THERMAL CONDUCTION; WATER PRESSURE;

MIRRORS;

EID: 33745624544 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.655499 Document Type: Conference Paper

Times cited : (9)

References (9)

1
- 33745609430
- (Miyazaki)
- G. Edwards, S. Wurm, O. Wood, S. Bajt, L. Klebanoff, T. Madey, T. Lucatorto, C. Tarrio, B. Jurczyk, and D. Ruzic, CD-ROM of EUVL Symposium 2004 (Miyazaki).
- (2004) CD-ROM of EUVL Symposium
- Edwards, G.¹ Wurm, S.² Wood, O.³ Bajt, S.⁴ Klebanoff, L.⁵ Madey, T.⁶ Lucatorto, T.⁷ Tarrio, C.⁸ Jurczyk, B.⁹ Ruzic, D.¹⁰

2
- 24644474047
- S. Bajt, Z. R. Dai, E. J. Nelson, M. A. Wall, J. Alameda, N. Nguyen, S. Baker, J. C. Robinson, J. S. Taylor, M. Clift, A. Aquila, E. M. Gullikson, and N. V. Ginger Edwards, Proc. SPIE 5751 (2005) 118
- (2005) Proc. SPIE , vol.5751 , pp. 118
- Bajt, S.¹ Dai, Z.R.² Nelson, E.J.³ Wall, M.A.⁴ Alameda, J.⁵ Nguyen, N.⁶ Baker, S.⁷ Robinson, J.C.⁸ Taylor, J.S.⁹ Clift, M.¹⁰ Aquila, A.¹¹ Gullikson, E.M.¹² Edwards, N.V.G.¹³

3
- 29044433412
- I. Nishiyama, H. Oizumi, K. Motai, A. Izumi, T. Ueno, H. Akiyama and A. Namiki, J. Vac. Sci. Technol. B 23 (2005) 3129.
- (2005) J. Vac. Sci. Technol. B , vol.23 , pp. 3129
- Nishiyama, I.¹ Oizumi, H.² Motai, K.³ Izumi, A.⁴ Ueno, T.⁵ Akiyama, H.⁶ Namiki, A.⁷

4
- 33745616278
- (San Diego)
- S. B. Hill, C. Tarrio, T. B. Lucatorto, T. Madey, S. Bajt, O. Wood, S. Wurm, G. Edwards CD-ROM of EUVL Symposium 2005 (San Diego).
- (2005) CD-ROM of EUVL Symposium
- Hill, S.B.¹ Tarrio, C.² Lucatorto, T.B.³ Madey, T.⁴ Bajt, S.⁵ Wood, O.⁶ Wurm, S.⁷ Edwards, G.⁸

5
- 24644455211
- Y. Kakutani, M. Niibe, H. Takase, S. Terashima, H. Kondo, S. Matsunari, T. Aoki, Y. Gomei, and Y. Fukuda, Proc. SPIE 5751 (2005) 1077.
- (2005) Proc. SPIE , vol.5751 , pp. 1077
- Kakutani, Y.¹ Niibe, M.² Takase, H.³ Terashima, S.⁴ Kondo, H.⁵ Matsunari, S.⁶ Aoki, T.⁷ Gomei, Y.⁸ Fukuda, Y.⁹

6
- 0342778780
- P.A.Redhead, Vacuum 12 (1962) 203.
- (1962) Vacuum , vol.12 , pp. 203
- Redhead, P.A.¹

7
- 0142055513
- P. A. Thiel and T. E. Madey, Surf. Sci. Rpts, 7 (1987) 211.
- (1987) Surf. Sci. Rpts , vol.7 , pp. 211
- Thiel, P.A.¹ Madey, T.E.²

8
- 33745588993
- Database at Center of X-ray Optics, Advanced Light Source, Lawrence Berkeley National Laboratory, http://www-cxro.lbl.gov/.

9
- 1542465089
- Chapter
- T. M. Orlando and D. Meisel, Chapter 17, 2001, ACS Symp. Series 778.
- (2001) ACS Symp. Series , vol.17 , pp. 778
- Orlando, T.M.¹ Meisel, D.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.