Influence of an additional ballast volume on a pulsed ICP discharge

Plasma Sources Science and Technology

Volumn 16, Issue 4, 2007, Pages 697-702

  Bogdanov, E A ^a   DeJoseph Jr , C A ^b   Demidov, V I ^c   Kudryavtsev, A A ^a   Serditov, K Yu ^a  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE NETWORKS; ARGON; CHARGED PARTICLES; COMPUTER SIMULATION; INDUCTIVELY COUPLED PLASMA; PLASMA DENSITY;

ACTIVE PHASE; AMBIPOLAR DIFFUSION; DISCHARGE CHAMBER; INDUCTIVELY COUPLED PLASMA DISCHARGE;

GLOW DISCHARGES;

EID: 34948894254     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/4/002     Document Type: Article

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