Effect of metastable atoms on near-wall voltage drop in the afterglow of a noble-gas radio-frequency inductive coupled plasma

Physics of Plasmas

Volumn 11, Issue 11, 2004, Pages 5350-5353

  Demidov, V I ^a   DeJoseph Jr , C A ^b   Kudryavtsev, A A ^c  

^a UES INC   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY; INDUCTIVE COUPLED PLASMA (ICP); METASTABLE ATOMS; PLASMA PROCESSING;

ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; ELECTRONS; FREQUENCIES; INERT GASES; IONS; PHASE TRANSITIONS; PLASMAS; TEMPERATURE DISTRIBUTION;

ATOMS;

EID: 10944271735     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1795844     Document Type: Article

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