Scaling Laws for the Spatial Distributions of the Plasma Parameters in the Positive Column of a DC Oxygen Discharge

Technical Physics

Volumn 48, Issue 9, 2003, Pages 1151-1158

  Bogdanov, E A ^a   Kudryavtsev, A A ^a   Tsendin, L D ^b   Arslanbekov, R R ^c   Kolobov, V I ^c   Kudryavtsev, V V ^d  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^b PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

^c CFD RESEARCH CORPORATION   (United States)

^d CFD Canada   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0141636420     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1611900     Document Type: Article

References (41)

1. M. Lieberman and A. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
2. H. J. Oskam, Philips Res. Rep. 13, 335 (1958).
3. M. V. Konjukov, Zh. Éksp. Teor. Fiz. 34, 908 (1958) [Sov. Phys. JETP 7, 629 (1958)]; Zh. Éksp. Teor. Fiz. 34, 1634 (1958) [Sov. Phys. JETP 7, 1122 (1958)].
4. M. V. Konjukov, Zh. Éksp. Teor. Fiz. 34, 908 (1958) [Sov. Phys. JETP 7, 629 (1958)]; Zh. Éksp. Teor. Fiz. 34, 1634 (1958) [Sov. Phys. JETP 7, 1122 (1958)].
5. M. V. Konjukov, Zh. Éksp. Teor. Fiz. 34, 908 (1958) [Sov. Phys. JETP 7, 629 (1958)]; Zh. Éksp. Teor. Fiz. 34, 1634 (1958) [Sov. Phys. JETP 7, 1122 (1958)].
6. M. V. Konjukov, Zh. Éksp. Teor. Fiz. 34, 908 (1958) [Sov. Phys. JETP 7, 629 (1958)]; Zh. Éksp. Teor. Fiz. 34, 1634 (1958) [Sov. Phys. JETP 7, 1122 (1958)].
7. J. B. Tompson, Proc. Phys. Soc. (London) 73, 818 (1959).
8. H. Sabadil, Beitr. Plasmaphys. 13, 235 (1973).
9. H. S. W. Massey, Negative Ions (Cambridge University Press, Cambridge, 1976; Mir, Moscow, 1979).
10. P. D. Edgeley and A. von Engel, Proc. R. Soc. London, Ser. A 370, 375 (1980).
11. G. L. Rogoff, J. Phys. D 18, 1533 (1985).
12. A. V. Phelps, J. Res. Natl. Inst. Stand. Technol. 95, 407 (1990).
13. L. D. Tsendin, Zh. Tekh. Fiz. 55, 2318 (1985) [Sov. Phys. Tech. Phys. 30, 1377 (1985)]; Zh. Tekh. Fiz. 59, 21 (1989) [Sov. Phys. Tech. Phys. 34, 11 (1989)].
14. L. D. Tsendin, Zh. Tekh. Fiz. 55, 2318 (1985) [Sov. Phys. Tech. Phys. 30, 1377 (1985)]; Zh. Tekh. Fiz. 59, 21 (1989) [Sov. Phys. Tech. Phys. 34, 11 (1989)].
15. L. D. Tsendin, Zh. Tekh. Fiz. 55, 2318 (1985) [Sov. Phys. Tech. Phys. 30, 1377 (1985)]; Zh. Tekh. Fiz. 59, 21 (1989) [Sov. Phys. Tech. Phys. 34, 11 (1989)].
16. L. D. Tsendin, Zh. Tekh. Fiz. 55, 2318 (1985) [Sov. Phys. Tech. Phys. 30, 1377 (1985)]; Zh. Tekh. Fiz. 59, 21 (1989) [Sov. Phys. Tech. Phys. 34, 11 (1989)].
17. C. M. Ferreira, G. Gousset, and M. Touzeau, J. Phys. D 21, 1403 (1988).
18. P. R. Daniels, R. N. Franklin, and J. Snell, J. Phys. D 22, 780 (1989); J. Phys. D 23, 823 (1990); J. Phys. D 26, 1636 (1993).
19. P. R. Daniels, R. N. Franklin, and J. Snell, J. Phys. D 22, 780 (1989); J. Phys. D 23, 823 (1990); J. Phys. D 26, 1636 (1993).
20. P. R. Daniels, R. N. Franklin, and J. Snell, J. Phys. D 22, 780 (1989); J. Phys. D 23, 823 (1990); J. Phys. D 26, 1636 (1993).
21. A. J. Lichtenberg, V. Vahedi, M. A. Lieberman, et al., J. Appl. Phys. 75, 2339 (1994).
22. A. J. Lichtenberg, I. G. Kouznetsov, T. D. Lee, et al., Plasma Sources Sci. Technol. 6, 437 (1997).
23. I. G. Kouznetsov, A. J. Lichtenberg, and M. A. Lieberman, J. Appl. Phys. 86, 4142 (1999).
24. R. N. Franklin, Plasma Sources Sci. Technol. 11, 31 (2002).
25. R. N. Franklin and J. Snell, J. Phys. D 32, 2190 (1999).
26. R. N. Franklin, J. Plasma Phys. 64, 131 (2000).
27. S. V. Berezhnoj, C. B. Shin, U. Buddemeier, and I. Kaganovich, Appl. Phys. Lett. 77, 800 (2000).
28. V. A. Feoktistov, V. V. Ivanov, A. M. Popov, et al., J. Phys. D 30, 423 (1997).
29. V. V. Ivanov, K. S. Klopovsky, D. V. Lopaev, et al., IEEE Trans. Plasma Sci. 27, 1279 (1999).
30. V. V. Ivanov, K. S. Klopovsky, D. V. Lopaev, et al., Fiz. Plazmy 26, 1038 (2000) [Plasma Phys. Rep. 26, 972 (2000)].
31. V. V. Ivanov, K. S. Klopovsky, D. V. Lopaev, et al., Fiz. Plazmy 26, 1038 (2000) [Plasma Phys. Rep. 26, 972 (2000)].
32. A. Kono, Appl. Surf. Sci. 192, 115 (2002).
33. E. A. Bogdanov and A. A. Kudryavtsev, Pis'ma Zh. Tekh. Fiz. 27 (21), 36 (2001) [Tech. Phys. Lett. 27, 905 (2001)].
34. E. A. Bogdanov and A. A. Kudryavtsev, Pis'ma Zh. Tekh. Fiz. 27 (21), 36 (2001) [Tech. Phys. Lett. 27, 905 (2001)].
35. E. A. Bogdanov, V. I. Kolobov, A. A. Kudryavtsev, and L. D. Tsendin, Zh. Tekh. Fiz. 72 (8), 13 (2002) [Tech. Phys. 47, 946 (2002)].
36. E. A. Bogdanov, V. I. Kolobov, A. A. Kudryavtsev, and L. D. Tsendin, Zh. Tekh. Fiz. 72 (8), 13 (2002) [Tech. Phys. 47, 946 (2002)].
37. A. V. Rozhansky and L. D. Tsendin, Transport Phenomena in Partially Ionized Plasma (Énergoatomizdat, Moscow, 1988; Taylor & Francis, London, 2001).
38. E. A. Bogdanov, A. A. Kudryavtsev, L. D. Tsendin, et al., Zh. Tekh. Fiz. 73 (8), 45 (2003) [Tech. Phys. 48, 983 (2003)].
39. E. A. Bogdanov, A. A. Kudryavtsev, L. D. Tsendin, et al., Zh. Tekh. Fiz. 73 (8), 45 (2003) [Tech. Phys. 48, 983 (2003)].
40. http://www.cfdrc.com/̃cfdplasma
41. E. W. McDaniel and E. Mason, The Mobility and Diffusion of Ions in Gases (Wiley, New York, 1973; Mir, Moscow, 1976).