Time-resolved investigations of pulsed microwave excited plasmas

Plasma Sources Science and Technology

Volumn 9, Issue 1, 2000, Pages 57-67

  Behle, St ^a   Brockhaus, A ^a   Engemann, J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRON DENSITY MEASUREMENT; ELECTRON SCATTERING; EMISSION SPECTROSCOPY; INTERFEROMETRY; MATHEMATICAL MODELS; MICROWAVE ANTENNAS; PLASMA PROBES; PRESSURE EFFECTS; SLOT ANTENNAS; TEMPERATURE DISTRIBUTION; TEMPERATURE MEASUREMENT;

LANGMUIR PROBES; MICROWAVE INTERFEROMETRY; PULSED MICROWAVE EXCITED PLASMAS;

PLASMA SOURCES;

EID: 0033898512     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/1/309     Document Type: Article

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