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Sensors and Actuators, A: Physical

Volumn 90, Issue 1-2, 2001, Pages 118-124

Thermal sensor properties of cermet resistor films on silicon substrates

(2) Sundeen, J E a Buchanan, R C a

a University of Cincinnati (United States)

Author keywords

Bolometer; Cermet; Flow sensor; Heater; Temperature coefficient of resistance

Indexed keywords

BOLOMETERS; CERMETS; ELECTRIC CONDUCTIVITY OF SOLIDS; FLOW MEASUREMENT; INFRARED RADIATION; PHYSICAL VAPOR DEPOSITION; RARE EARTH ADDITIONS; RESISTORS; SINTERING; SUBSTRATES; THERMAL EFFECTS;

CERMET RESISTOR FILMS; FLOW SENSORS; METALLO-ORGANIC DEPOSITION (MOD) TECHNIQUES;

SILICON SENSORS;

EID: 0035341462 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-4247(00)00562-8 Document Type: Article

Times cited : (31)

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