The current understanding of the trap generation mechanisms that lead to the power law model for gate dielectric breakdown

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2007, Pages 197-208

  Nicollian, Paul E ^a   Krishnan, Anand T ^a   Chancellor, Cathy A ^a   Khamankar, Rajesh B ^a   Chakravarthi, Srinivasan ^a   Bowen, Chris ^a   Reddy, Vijay K ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRAPPING; CHEMICAL BONDS; ELECTRIC BREAKDOWN; ELECTRIC EXCITATION;

POWER LAW MODELS; TRAP GENERATION; VIBRATIONAL EXCITATION;

GATE DIELECTRICS;

EID: 34548725054     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2007.369892     Document Type: Conference Paper

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