MVHR (Multi-vibrational Hydrogen Release): Consistency with bias temperature instability and dielectrics breakdown

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 377-380

  Ribes, G ^a,b   Bruyere S ^a   Denais, M ^a,c   Roy, D ^a   Ghibaudo, G ^b  

^a STMICROELECTRONICS   (France)

^b IMEP LAHC   (France)

^c AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

Breakdown; BTI; Hydrogen

Indexed keywords

BREAKDOWN; BTI; MULTI-VIBRATIONAL HYDROGEN RELEASE (MVHR); OXIDE BREAKDOWN;

DIELECTRIC MATERIALS; STRESS ANALYSIS; THERMAL EFFECTS; VIBRATIONS (MECHANICAL);

HYDROGEN;

EID: 28744447429     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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