The traps that cause breakdown in deeply scaled SiON dielectrics

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2006, Pages

  Nicollian, Paul E ^a   Krishnan, Anand T ^a   Chancellor, Cathy A ^a   Khamankar, Rajesh B ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACE STATES; INTERFACE TRAPPING; LOW VOLTAGES; RATE-LIMITING STEP;

ELECTRON DEVICES;

EID: 46049086984     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2006.346893     Document Type: Conference Paper

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