Interaction of SiHx precursors with hydrogen-covered Si surfaces: Impact dynamics and adsorption sites

Surface Science

Volumn 601, Issue 18, 2007, Pages 3970-3973

  Cereda, S ^a   Montalenti, F ^a   Miglio, Leo ^a  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

Atom surface interaction; Density functional; Empirical calculations; Hydrogen; Molecular dynamics; Silicon

Indexed keywords

ADSORPTION; COMPUTER SIMULATION; DENSITY FUNCTIONAL THEORY; HYDROGEN; MOLECULAR DYNAMICS; SILICON;

ADSORPTION SITES; ATOM SURFACE INTERACTION; EMPIRICAL CALCULATIONS; IMPACT DYNAMICS;

SILICON COMPOUNDS;

EID: 34548614826     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.04.086     Document Type: Article

References (21)

1. Satake K., and Graves D.B. J. Chem. Phys. 118 (2003) 6503
2. Cavallotti C., Stanislao M.D., and Carrà S. Prog. Cryst. Growth Charact. Mater. 48/49 (2004) 123
3. Maroudas D. Adv. Chem. Eng. 28 (2001) 251
4. Rosenblad C., Deller H.R., Döbeli M., Müller E., and von Känel H. Thin Solid Films 318 (1998) 11
5. Rosenblad C., Deller H.R., Dommann A., Meyer T., Schroeter P., and von Känel H. J. Vac. Sci. Technol. A 16 (1998) 2785
6. Rosenblad C., Deller H.R., and von Känel H. Mater. Sci. Eng. B 58 (1999) 76
7. Izumi S., Sato Y., Hara S., and Sakai S. Surf. Sci. 560 (2004) 1
8. Murty M.V.R., and Atwater H.A. Phys. Rev. B 51 (1995) 4889
9. S. Cereda, M. Ceriotti, F. Montalenti, M. Bernasconi, L. Miglio, Phys. Rev. B., in press.
10. Ohira T., Ukai O., and Noda M. Surf. Sci. 458 (2001) 216
11. Satake K., and Graves D.B. J. Vac. Sci. Technol. A 21 (2003) 484
12. Humbird D., and Graves D.B. J. Appl. Phys. 96 (2004) 65
13. Kresse G., and Hafner J. Phys. Rev. B 49 (1994) 14251
14. Kresse G., and Furthmüller J. Comp. Mater. Sci. 6 (1996) 15
15. Vanderbilt D. Phys. Rev. B 41 (1990) 7892
16. Wang Y., and Perdew J.P. Phys. Rev. B 44 (1991) 13298
17. Perdew J.P., Chevary J.A., Jackson S.H.V.K.A., and Pederson M.R. Phys. Rev. B 46 (1992) 6671
18. Ramalingam S., Maroudas D., Aydil E.S., and Walch S.P. Surf. Sci. 418 (1998) L8
19. Cereda S., Montalenti F., Cogoni M., Branduardi D., Radny M.W., Smith P.V., and Miglio L. Surf. Sci. 600 (2006) 4445
20. Hong S., and Chou M.Y. Phys. Rev. B 58 (1998) R13363
21. Rauscher H. Surf. Sci. Rep. 42 (2001) 207