Silicon epitaxial growth on the Si(001)2×1 surface from silane using dynamic Monte Carlo simulations

Journal of Chemical Physics

Volumn 118, Issue 14, 2003, Pages 6503-6511

  Satake, Koji ^a   Graves, David B ^b  

^a MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ADSORPTION; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; EPITAXIAL GROWTH; MOLECULAR BEAM EPITAXY; MOLECULAR DYNAMICS; MONTE CARLO METHODS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SILANES; SURFACE STRUCTURE; TEMPERATURE;

ARRHENIUS ACTIVATION ENERGY OF GROWTH; DANGLING BOND; DEFECT INDUCED ISOMERIZATION; DYNAMIC MONTE CARLO SIMULATION;

SEMICONDUCTING SILICON;

EID: 0038298768     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1559151     Document Type: Article

References (44)

1. D. W. Hess, K. F. Lensen, and T. J. Anderson, Rev. Chem. Eng. 3, 97 (1985).
2. M. E. Coltrin, R. J. Kee, and J. A. Miller, J. Electrochem. Soc. 131, 425 (1984).
3. M. E. Coltrin, R. J. Kee, and J. A. Miller, J. Electrochem. Soc. 133, 1206 (1986).
4. P. Ho, M. E. Coltrin, and W. G. Breiland, J. Phys. Chem. 98, 10138 (1994).
5. W. L. M. Weerts, M. H. J. M. de Croon, and G. B. Marin, J. Electrochem. Soc. 144, 3213 (1997).
6. B. A. Joyce and R. R. Bradley, J. Electrochem. Soc. 110, 1235 (1963).
7. T. J. Donahue and R. Reif, J. Appl. Phys. 57, 2757 (1985).
8. T. J. Donahue and R. Reif, J. Electrochem. Soc. 133, 1691 (1986).
9. J. H. Comfort and R. Reif, J. Electrochem. Soc. 136, 2386 (1989).
10. M. Tao, Thin Solid Films 223, 201 (1993).
11. H. C. Kang and W. H. Weinberg, J. Chem. Phys. 90, 2824 (1989).
12. K. A. Fichthorn and W. H. Weinberg, J. Chem. Phys. 95, 1090 (1991).
13. R. Kissel-Osterrieder, F. Behrendt, and J. Warnatz, Proc. of the Combustion Institute 28, 1323 (2000).
14. M. M. Clark, L. M. Raff, and H. L. Scott, Phys. Rev. B 54, 5914 (1996).
15. M. R. Radeke and E. A. Carter, Phys. Rev. B 55, 4649 (1997).
16. J. Flidr, Y. Huang, T. A. Newton, and M. Hines, J. Chem. Phys. 108, 5542 (1998).
17. C. C. Battaile, D. J. Srolovitz, and J. E. Butler, J. Appl. Phys. 82, 6293 (1997).
18. T. Kawamura, S. Toyoshima, and A. Ichimiya, Surf. Sci. 514, 60 (2002).
19. M. Fearn, M. Sayed, J. H. Jefferson, and D. J. Robbins, Mater. Res. Soc. Symp. Proc. 584, 257 (2000).
20. M. A. Gallivan, R. M. Murray, and D. G. Goodwin, Mater. Res. Soc. Symp. Proc. 616, 61 (2000).
21. S. W. Levine and P. Clancy, Modell. Simul. Mater. Sci. Eng. 8, 751 (2000).
22. G. Henkeman and H. Jónsson, J. Chem. Phys. 115, 9657 (2001).
23. K. A. Fichthorn, M. L. Merrick, and M. Scheffler, Appl. Phys. A: Mater. Sci. Process. 74, 17 (2002).
24. Y. G. Yang, R. A. Johnson, and H. N. G. Wadley, Surf. Sci. 499, 141 (2002).
25. A. M. Bowler and E. S. Hood, J. Chem. Phys. 94, 5162 (1991).
26. E. J. Dawnkaski, D. Srivastave, and B. J. Garrison, J. Chem. Phys. 102, 9401 (1995).
27. E. J. Dawnkaski, D. Srivastave, and B. J. Garrison, J. Chem. Phys. 104, 5997 (1996).
28. J. J. Harris and B. A. Joyce, Surf. Sci. 103, L90 (1981).
29. A. R. Brown and D. J. Doren, J. Chem. Phys. 110, 2643 (1999).
30. M. L. Wise, B. G. Koehler, P. Gupta, P. A. Coon, and S. M. George, Surf. Sci. 258, 5482 (1991).
31. U. Höfer, L. Li, and T. F. Heinz, Phys. Rev. B 45, 9485 (1992).
32. M. C. Flowers, N. B. H. Jonathan, Y. Liu, and A. Morris, J. Chem. Phys. 99, 7038 (1993).
33. P. Nachtigall, K. D. Jordan, and C. Sosa, J. Chem. Phys. 101, 8073 (1994).
34. M. R. Radeke and E. A. Carter, Surf. Sci. 355, L289 (1996).
35. M. R. Radeke and E. A. Carter, Phys. Rev. B 54, 11803 (1996).
36. C. J. Wu, I. V. Ionova, and E. A. Carter, Phys. Rev. B 49, 13488 (1994).
37. C. J. Wu and E. A. Carter, Phys. Rev. B 46, 4651 (1992).
38. D. J. Chadi, Phys. Lett. A 59, 1691 (1987).
39. D. Srivastava and B. J. Garrison, Phys. Rev. Lett. 47, 4464 (1993).
40. S. Jeong and A. Oshiyama, Phys. Rev. Lett. 81, 5366 (1998).
41. G. Brocks, P. J. Kelly, and R. Car, Phys. Rev. Lett. 66, 1729 (1991).
42. G. Lucovsky, R. J. Nemanich, and J. C. Knights, Phys. Rev. B 19, 2064 (1979).
43. T. Irisawa, Y. Arima, and T. Kuroda, J. Cryst. Growth 99, 491 (1990).
44. T. Irisawa, A. Ichimiya, and T. Kuroda, Surf. Sci. 242, 148 (1991).