Ion beam mixing by focused ion beam

Journal of Applied Physics

Volumn 102, Issue 5, 2007, Pages

  Barna, Árpád ^a   Kotis, László ^a   Lábár, János L ^a   Osváth, Zoltán ^a   Tóth, Attila L ^a   Menyhárd, Miklós ^a   Zalar, Anton ^b   Panjan, Peter ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; FOCUSED ION BEAMS; MULTILAYERS; TRANSMISSION ELECTRON MICROSCOPY;

ASYMMETRIC MIXING; FREE SURFACES; TRIDYN SIMULATION;

POLYCRYSTALLINE MATERIALS;

EID: 34548610363     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2776009     Document Type: Article

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