Experimental and theoretical determination of the mixing efficiency at low-energy Ar+ bombardment: Case study of the Cu/Co system

Surface and Interface Analysis

Volumn 39, Issue 6, 2007, Pages 487-492

  Menyhard, M ^a   Suie P ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

AES depth profiling; Ballistic mixing; Ion beam mixing; MD simulation

Indexed keywords

COMPUTER SIMULATION; CONCENTRATION (PROCESS); DEPTH PROFILING; ION BEAMS; ION BOMBARDMENT; MOLECULAR DYNAMICS; POSITIVE IONS; SILVER;

AUGER INTENSITIES; BALLISTIC MIXING; ION BEAM MIXING;

COPPER;

EID: 34249082049     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2557     Document Type: Article

References (31)

1. Knapp JA, Borgesen P, Zuhr RA. Proceedings Beam-Solid Interactions; Physical Phenomena, Vol. 157, Part III, MRS, Pittsburgh, PA, 1989.
2. Boise W. Mater. Sci. Eng. 1994; R12: 53.
3. Sigmund P, Gras-Marti A. Nucl. Instrum. Methods 1980; 168: 389.
4. Sigmund P. Sputtering by Particle Bombardment I Topics in Applied Physics, Vol. 47, Behrisch R (ed.). Springer-Verlag: Berlin, Heidelberg, New York, 1981.
5. Cheng YT. Mater. Sci. Rept. 1990; 5: 47.
6. Vineyard GH. Radiat. Eff. 1976; 19: 245.
7. Kim SJ, Nicolet MA, Averback RS, Peak D. Physiol. Rev. 1988; B37: 38.
8. Miotello A, Kelly R. Nucl. Instrum. Methods Phys. Res., Sect. B 1997; 122: 458.
9. Averback RS, Diaz De la Rubia TD. Solid State Phys. 1998; 51: 281.
10. Karolewski MA. Nucl. Instrum. Methods Phys. Res., Sect. B 2006; B243: 6.
11. Thijsse BJ, Klaver TPC, Haddeman EFC. Appl. Surf. Sci. 2004; 231-232: 29.
12. Cai M, Veres T, Roorda S, Schiettekatte F, Cochrane RW. J. Appl. Phys. 2004; 95:1996.
13. Crespo-Sosa A, Munoz M, Cheang-Wong JC, Oliver A, Saniger JM, Banuelos JG. Mater. Sei. Eng. B 2003; B100: 297.
14. Neubauer M, Lieb KP, Schaaf P, Uhrmacher M. Phys. Rev. 1995; B53: 10237.
15. Ikeda A, Sumitomo K, Nishioka T, Yasue T, Koshikawa T, Kido Y. Surf. Sc i. 1997; 385: 200.
16. Lee JC, Jeong CS, Kang HJ, Kim HK, Moon DW. Appl. Surf. Sci. 1996; 100/101: 97.
17. Oh DW, Oh SK, Kang HJ, Lee HI, Moon DW. Nucl. Instrum. Methods Phys. Res., Sect. B 2002; 190: 598.
18. Barna A, Menyhard M, Zsolt G, Khanh NQ, Zalar A, Panjan P. J. Vac. Sci. Technol., A 2003; 21:196, 553.
19. Barna A, Radnóczi G, Pécz B. Sample preparation techniques for TEM. In Handbook for Microscopy, vol. 3, Applications, II. Special Topics, Amelickx S, Van Dyck D, van Tendeloo J (eds), Chapt. 3. VCH Verlaggesellschaft mbH: Weinheim, 1997; 751.
20. Barna A, Menyhard M. Phys. Stat. Sol. A 1994; 145: 263.
21. http://www.srim.org.
22. Möller W, Posselt M. Forschungzentrum Rossendorf, 01314 Dresden, Germany, TRIDYNJ-ZR, FZR-317.
23. Nordlund K. Comput. Mater. Sci. 1995; 3: 448.
24. Süle P, Menyhard M. Phys. Rev. 2005; B71: 113413.
25. Süle P, Menyhard M, Nordlund K. Nucl. Instrum. Methods Phys. Res., Sec. B 2004; B226: 517.
26. Süle P, Menyhard M, Nordlund K. Nucl. Instrum. Methods Phys. Res., Sec. B 2004; B222: 525.
27. Süle P. http://www.mfa.kfki.hu/~sule/animations/cuco.htlm.
28. Barna A, Menyhard M, Zalar A, Panjan P. Appl. Surf. Sci. 2005; 242: 375.
29. Menyhard M, Zsolt G, Chen PJ, Powell CJ, McMichael RD, Egelhoff WF Jr. Appl. Surf. Sci. 2001; 180: 315.
30. NIST. Electron Inelastic-Electron-Mean-Free-Path Database Standard Reference Database 71, Version 1.1. National Institute of Standards and Technology: Gaithersburg MD, 2000.
31. Hofmann S. Surf. Interface Anal. 1994; 21: 673.