High-depth-resolution Auger depth profiling/atomic mixing

Micron

Volumn 30, Issue 3, 1999, Pages 255-265

  Menyhard, M ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

Atomic mixing; Auger depth profiling; Ion induced damage; TRIM simulation

Indexed keywords

EID: 0033007396     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(99)00010-4     Document Type: Article

References (61)

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