On the deembedding issue of CMOS multigigahertz measurements

IEEE Transactions on Microwave Theory and Techniques

Volumn 55, Issue 9, 2007, Pages 1813-1822

  Issaoun, Ammar ^b   Xiong, Yong Zhong ^a,b   Shi, Jinglin ^b   Brinkhoff, James ^a,b   Lin, Fujiang ^a,b  

^a IEEE

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Deembedding methods; Four step; Improved three step; On wafer measurements; Open short; Three step; Thru; Thrushort; Two line

Indexed keywords

CASCADE CONNECTIONS; EQUIVALENT CIRCUITS; MICROWAVES; MOSFET DEVICES; PROBES;

CMOS MULTIGIGAHERTZ MEASUREMENTS; PARASITICA; PROBE PADS; SEMICONDUCTING SUBSTRATE;

CMOS INTEGRATED CIRCUITS;

EID: 34548543851     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2007.904041     Document Type: Article

References (16)

1. M. J. Deen, C. H. Chen, S. Asgaran, G. A. Rezvani. J. Tao, and Y. Kiyota, "High-frequency noise of modern MOSFETs: Compact modeling and measurement issues," IEEE Trans. Electron Devices, vol. 53, no. 9, pp. 2062-2081, Sep. 2006.
2. M. B. Jenner and T. E. Kolding, 'Test structures and techniques for on-wafer CMOS TRL calibration," in Proc. IEEE Int. Microelectron. Test Structures Conf., Mar. 2001, pp. 137-141.
3. M. H. Cho, G. W. Huang, Y. H. Wang, and L. K. Wu, "A scalable noise deembedding technique for on-wafer microwave device characterization," IEEE Microw. Wireless Compon. Lett., vol. 15. no. 10, pp. 649-651, Oct. 2005.
4. H. Cho and D. E. Burk, "A three-step method for the deembedding of high-frequency 5-parameter measurements," IEEE Trans. Electron Devices, vol. 38, no. 6, pp. 1371-1375, Jun. 1991.
5. E. P. Vandamme, D. Schreurs, and C. Van Dinther, "Improved threestep deembedding method to accurately account for the influence of pad parasitics in Si on-wafer RF test-structures," IEEE Trans. Electron Devices, vol. 48, no. 4, pp. 737-742, Apr. 2001.
6. M. C. A. M. Koolen, J. A. M. Geelen, and M. P. J. G. Versleijen, "An improved deembedding technique for on-wafer high-frequency characterization, " in Proc. IEEE Bipolar Circuits Technol. Meeting, Minneapolis, MN, Sep. 1991, pp. 188-191.
7. T. E. Kolding, "A four-step method for deembedding gigahertz on-wafer CMOS measurements," IEEE Trans. Electron Devices, vol. 47, no. 4, pp. 734-740, Apr. 2000.
8. T. E. Kolding, "On-wafer calibration techniques for giga-hertz CMOS measurements," in Proc. IEEE Int. Microelectronic Test Structures Conf., Götebörg, Sweden, Mar. 1999, pp. 105-110.
9. C. H. Chen and M. J. Deen, "A general noise and 5-parameter deembedding procedure for on-wafer high-frequency noise measurements of MOSFETs," IEEE Trans. Microw. Theory Tech.. vol. 49, no. 5, pp. 1004-1005, May 2001.
10. M. H. Cho, G. W. Huang, K. M. Chen, and A. S. Peng, "A novel cascade based deembedding method for on-wafer microwave characterization and automatic measurement," in IEEE MTT-S Int. Microw. Symp. Dig., Jun. 2004, pp. 1237-1240.
11. L. F. Tiemeijer and R. J. Havens, "A calibrated lumped-element deembedding technique for on-wafer RF characterization of high-quality inductors and high-speed transistors," IEEE Trans. Electron Devices, vol. 50, no. 3, pp. 1371-1375, Mar. 2003.
12. J. Song, F. Ling, G. Flynn, W. Blood, and E. Demircan, "A deembedding technique for interconnects," in Proc. Elect. Performance Electron. Packag., Cambridge. MA, Oct. 2001, pp. 129-132.
13. M.-H. Cho, G.-W. Huang, L.-K. Wu, C-S. Chiu, Y.-H. Wang, K.-M. Chen, H.-C. Tseng, and T.-L. Hsu, "A shield-based three-port deembedding method for microwave on-wafer characterization of deep submicron silicon MOSFETs," IEEE Trans. Microw. Theoiy Tech., vol. 53, no. 9, pp. 2926-2934, Sep. 2005.
14. T. E. Kolding. O. K. Jensen, and T. Larsen, "Ground-shielded measuring technique for accurate on-wafer characterization of RF CMOS devices," in Proc. IEEE Int. Microelectron. Test Structures Conf., Monterey, CA, Mar. 2000, pp. 106-111.
15. D. F. Williams, R. B. Marks, and A. Davidson, "Comparison of on-wafer calibrations," in 38th ARFTG Conf. Dig., San Diego, CA, Dec. 1991, pp. 68-81.
16. A. Davidson, K. Jones, and E. Strid, "LRM and LRRM calibrations with automatic determination of load inductance," in 36th ARFTG Conf. Dig., Monterey, CA, Nov. 1990, pp. 57-62.