Ground-shielded measuring technique for accurate on-wafer characterization of RF CMOS devices

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2000, Pages 246-251

  Kolding, Troels Emil ^a   Jensen, Ole Kiel ^a   Larsen, Torben ^a  

^a AALBORG UNIVERSITY   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY; ELECTRIC IMPEDANCE; INTEGRATED CIRCUIT LAYOUT; MATRIX ALGEBRA; MOSFET DEVICES; SCATTERING PARAMETERS; SEMICONDUCTOR DEVICE MODELS; SUBSTRATES;

DE EMBEDDING; DEVICE UNDER TEST; GROUND SHIELDED TEST FIXTURE; IMPEDANCE STANDARD SUBSTRATE; LOW RESISTIVITY SUBSTRATE;

CMOS INTEGRATED CIRCUITS;

EID: 0033687809     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)