Dispersive white-light interferometry for thin-film thickness profile measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5856 PART I, Issue , 2005, Pages 419-426

  Ghim, Young Sik ^a   Kim, Seung Woo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

3 D surface profile measurement; Dispersive white light interferometry; Interferometer; Polarization; Thin film thickness profile measurement

Indexed keywords

3-D SURFACE PROFILE MEASUREMENT; DISPERSIVE WHITE-LIGHT INTERFEROMETRY; MICRO-ENGINEERED SURFACES; THIN-FILM THICKNESS PROFILE MEASUREMENT;

DISPERSION (WAVES); INTERFEROMETERS; LIQUID CRYSTAL DISPLAYS; POLARIZATION; SURFACE MEASUREMENT; THICKNESS MEASUREMENT; THIN FILMS;

INTERFEROMETRY;

EID: 28844454239     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.612076     Document Type: Conference Paper

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