A probe-positioning method with two-dimensional calibration pattern for micro-multi-point probes

Review of Scientific Instruments

Volumn 74, Issue 5, 2003, Pages 2722-2725

  Yashiro, Wataru ^a,b   Shiraki, Ichiro ^a,b   Miki, Kazushi ^a,b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; CELLULAR ARRAYS; ELECTRON BEAM LITHOGRAPHY; FABRICATION;

MICRO-MULTI-POINT PROBES; PROBE-POSITIONING PATTERNS;

PROBES;

EID: 0038527405     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1569390     Document Type: Article

References (4)

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2. I. Shiraki, C. L. Petersen, P. Boggid, T. M. Hansen, T. Nagao, F. Grey, and S. Hasegawa, Appl. Phys. Lett. 77, 3782 (2000).
3. I. Shiraki, F. Tanabe, R. Hobara, T. Nagao, and S. Hasegawa, Surf. Sci. 493, 633 (2001).
4. Probe tip locator, U.S. Patent No. 6,178,653B1, J. E. Griffith, C. E. Bryson, and J. B. Bindell (30 Jan. 2001).