Cr Nx and Cr1-x Alx N as template films for the growth of α -alumina using ac reactive magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 5, 2007, Pages 1367-1372

  Pulugurtha, S R ^a   Bhat, D G ^a   Gordon, M H ^a  

^a University of Arkansas

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CHROMIUM COMPOUNDS; MAGNETRON SPUTTERING; OXIDATION; SCANNING ELECTRON MICROSCOPY; X RAY ANALYSIS;

CHROMIUM OXIDE; REACTIVE MAGNETRON SPUTTERING; TEMPLATE FILMS; X-RAY MICROANALYSIS;

THIN FILMS;

EID: 34548257209     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2756542     Document Type: Article

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