Growth and characterization of chromium oxide thin films prepared by reactive ac magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 5, 2006, Pages 1870-1877

  Khanna, Atul ^a,c   Bhat, Deepak G ^a   Payzant, E A ^b  

^a University of Arkansas   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c GURU NANAK DEV UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON OXYGEN PLASMA; CHROMIUM OXIDES; DISCHARGE POWER; GLASS SUBSTRATES;

ALUMINA; ANNEALING; CHROMIUM COMPOUNDS; CRYSTAL ORIENTATION; CRYSTALS; FILM GROWTH; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICON; SPUTTER DEPOSITION; X RAY DIFFRACTION;

THIN FILMS;

EID: 33748615179     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2244536     Document Type: Article

References (28)

1. G. V. Samsonov, Oxide Handbook, 2nd ed. (IFI/Plenum, New York, 1982).
2. B. Bhushan, G. S. A. M. Theunissen, and X. Li, Thin Solid Films 311, 67 (1997).
3. P. Jin, G. Xu, M. Tazawa, K. Yoshimura, D. Music, J. Alami, and U. Helmersson, J. Vac. Sci. Technol. A 20, 2134 (2002).
4. T. Kohara, H. Tamagaki, Y. Ikari, and H. Fujii, Surf. Coat. Technol. 185, 166 (2001).
5. R. F. Bunshah, Handbook of Hard Coatings (Noyes, Park Ridge, NJ, 2001).
6. M. Halvarsson and S. Vuorinen, Surf. Coat. Technol. 76-77, 287 (1995).
7. A. Larsson, M. Halvarsson, and S. Vuorinen, Int. J. Refract. Met. Hard Mater. 16, 369 (1998).
8. O. Zywitzki, G. Hoetzsch, F. Fietzke, and K. Goedicke, Surf. Coat. Technol. 82, 169 (1996).
9. A. S. Kao, M. F. Doemer, and V. J. Novotny, J. Appl. Phys. 66, 5315 (1989).
10. G. Contoux, F. Cosset, A. Célérier, and J. Machet, Thin Solid Films 292, 75 (1997).
11. B. Bhushan, Thin Solid Films 73, 255 (1980).
12. P. Hones, M. Diserens, and F. Lévy, Surf. Coat. Technol. 120-121, 277 (1999).
13. U. Rothhaar and H. Oechsner, Thin Solid Films 324, 165 (1998).
14. J. M. Schneider and W. D. Sproul, 40th Annual Technical Conference Proceedings (Society of Vacuum Coalers, 1997), p. 301.
15. H.-S. Ahun and O.-K. Kwon, Wear 225-229, 814 (1999).
16. J. C. Nable, S. L. Suib, and F. S. Galasso, Surf. Coat. Technol. 186, 423 (2004).
17. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1965).
18. J. C. Manifacier, J. Gasiot, and J. P. Fillard, J. Phys. E 9, 2002 (1974).
19. R. Swanepoel, J. Phys. E 16, 1214 (1983).
20. Powder diffraction file PDF No. 38-1479.
21. A. Khanna, D. G. Bhat, A. Harris, and B. Beake, Surf. Coat. Technol. (in press).
22. A. Khanna and D. G. Bhat, Surf. Coat. Technol. 201, 168 (2006).
23. M. Birkholz, Thin Film Analysis by X-ray Scattering (Wiley-VCH, Weinheim, Germany, 2006).
24. CRC Handbook of Chemistry and Physics, 84th ed. (CRC, Boca Raton, FL, 2003).
25. A. J. Stirling and W. D. Westwood, Thin Solid Films 7, 1 (1971).
26. J. M. Schneider, A. Anders, B. Hjörvarsson, I. Petrov, K. Macák, U. Helmersson, and J. Sundergen, Appl. Phys. Lett. 74, 200 (1999).
27. J. M. Schneider, B. Hjörvarsson, X. Wing, and L. Hultsman, Appl. Phys. Lett. 75, 3476 (1999).
28. J. M. Schneider, K. Larsson, J. Lu, E. Olsson, and B. Hjörvarsson, Appl. Phys. Lett. 80, 1144 (2002).