Role of hydrogen for the elastic properties of alumina thin films

Applied Physics Letters

Volumn 80, Issue 7, 2002, Pages 1144-1146

  Schneider, Jochen M ^a   Larsson, Karin ^b   Lu, Jun ^b   Olsson, Eva ^b   Hjörvarsson, Björgvin ^b,c  

^a LINKÖPING UNIVERSITY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

^c ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA THIN FILMS; AMORPHOUS ALUMINA; ELASTIC MODULUS VALUES; ELASTIC PROPERTIES; ELECTRONIC STRUCTURE CALCULATIONS; HYDROGEN CONCENTRATION; HYDROGEN INCORPORATION; NUCLEAR RESONANCE ANALYSIS; REACTIVE MAGNETRON SPUTTERING; RUTHERFORD BACK-SCATTERING SPECTROMETRY; SELECTED AREA ELECTRON DIFFRACTION;

ALUMINA; ELASTIC MODULI; ELASTICITY; ELECTRON DIFFRACTION; ELECTRONIC STRUCTURE; HYDROGEN; NANOINDENTATION; OPTICAL FILMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS;

AMORPHOUS FILMS;

EID: 79955987564     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1448389     Document Type: Article

References (17)

1. R. Cueff, C. Baud, J. P. Besse, and M. Jacquet, Thin Solid Films 266, 198 (1995). tsf THSFAP 0040-6090
2. C. A. Ross, J. Vac. Sci. Technol. A 14, 2511 (1996). jva JVTAD6 0734-2101
3. J. M. Schneider, W. D. Sproul, and A. Matthews, Surf. Coat. Technol. 94-95, 179 (1997). sct SCTEEJ 0257-8972
4. J. M. Schneider, A. Anders, B. Hjörvarsson, I. Petrov, K. Macak, U. Helmersson, and J.-E. Sundgren, Appl. Phys. Lett. 74, 200 (1999). apl APPLAB 0003-6951
5. J. M. Schneider, B. Hjörvasson, X. Wang, and L. Hultman, Appl. Phys. Lett. 75, 3476 (1999). apl APPLAB 0003-6951
6. R. L. Doolittle, Nucl. Instrum. Methods Phys. Res. B 15, 344 (1985). nib NIMBEU 0168-583X
7. B. Hjörvarsson, J. Ryden, E. Karlsson, J. Birch, and J. E. Sundgren, Phys. Rev. B 43, 6440 (1991). prb PRBMDO 0163-1829
8. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992). jmr JMREEE 0884-2914
9. I. Levin and D. Brandon, J. Am. Ceram. Soc. 81, 1995 (1998). jac JACTAW 0002-7820
10. P. J. Flory, C. J. Jackson, and J. Wood, Statistical Mechanics of Chain Molecules (Oxford University Press, New York, 1989), pp. 49-94.
11. http://www.accelrys.com/cerius2/index.html
12. L. Kleinman and D. M. Bylander, Phys. Rev. Lett. 48, 1425 (1982). prl PRLTAO 0031-9007
13. M. P. Teter, M. C. Payne, and D. C. Allan, Phys. Rev. B 40, 12255 (1989). prb PRBMDO 0163-1829
14. J. P. Perdew and Y. Wang, Phys. Rev. B 45, 13244 (1992). prb PRBMDO 0163-1829
15. B. Hammer, K. W. Jacobsen, and J. K. Norskov, Phys. Rev. Lett. 70, 3971 (1993). prl PRLTAO 0031-9007
16. H. J. Monkhorst and J. D. Pack, Phys. Rev. B 13, 5188 (1976). prq PLRBAQ 0556-2805
17. Slag Atlas (Verlag Stahleisen, 1995), pp. 317-318.