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Volumn 36, Issue 8, 2007, Pages 1007-1012

Comparing ICP and ECR etching of HgCdTe, CdZnTe, and CdTe

(3) Stoltz, A J a Varesi, J B a Benson, J D a

a NIGHT VISION AND ELECTRONIC SENSORS DIRECTORATE (United States)

Author keywords

Cadmium telluride (CdTe); Electron cyclotron resonance (ECR); Inductively coupled plasma (ICP); Mercury cadmium telluride (HgCdTe); Plasma

Indexed keywords

BINARY SEMICONDUCTORS; KWD MERCURY CADMIUM TELLURIDE (HGCDTE); PLASMA EXCITATION;

ELECTRON CYCLOTRON RESONANCE; INDUCTIVELY COUPLED PLASMA; ION BEAM ASSISTED DEPOSITION; IONIZATION; MERCURY COMPOUNDS; PLASMA APPLICATIONS; SURFACE ROUGHNESS;

SEMICONDUCTING CADMIUM TELLURIDE;

EID: 34548250994 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-007-0163-z Document Type: Conference Paper

Times cited : (16)

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