A Langmuir probe investigation of electron cyclotron resonance argon-hydrogen plasmas

Journal of Electronic Materials

Volumn 34, Issue 6, 2005, Pages 733-739

  Stoltz, A J ^a   Sperry, M J ^a   Benson, J D ^a   Varesi, J B ^a   Martinka, M ^a   Almeida, L A ^a   Boyd, P R ^b   Dinan, J H ^a  

^a US Army Research Development and Engineering Command   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Electron cyclotron resonance (ECR); Langmuir probe

Indexed keywords

ARGON; CARRIER CONCENTRATION; CONCENTRATION (PROCESS); ELECTRON CYCLOTRON RESONANCE; HYDROGEN; IONIZATION; SUBSTRATES; VELOCITY MEASUREMENT;

AR-H2 PLASMAS; GAS CONCENTRATIONS; HYDROGEN PLASMA; LANGMUIR PROBE;

PLASMAS;

EID: 21644447368     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-005-0012-x     Document Type: Conference Paper

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