Study of the pixel-pitch reduction for HgCdTe infrared dual-band detectors

Journal of Electronic Materials

Volumn 33, Issue 6, 2004, Pages 690-700

  Baylet, J ^a   Gravrand, O ^a   Laffosse, E ^a   Vergnaud, C ^a   Ballerand, S ^a   Aventurier, B ^a   Deplanche, J C ^a   Ballet, P ^a   Castelein, P ^a   Chamonal, J P ^a   Million, A ^a   Destefanis, G ^a  

^a CEA LETI   (France)

Author keywords

Dry etching; Dual band infrared (IR) detection; Electron cyclotron resonance (ECR) plasma; HgCdTe

Indexed keywords

ANISOTROPY; ARRAYS; BAND STRUCTURE; DRY ETCHING; ELECTROOPTICAL EFFECTS; MERCURY COMPOUNDS; MOLECULAR BEAM EPITAXY; OPTICAL RESOLVING POWER; PARAMETER ESTIMATION; REDUCTION; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

DETECTOR ARRAYS; DUAL-BAND INFRARED (IR) DETECTION; HGCDTE; PIXEL-PITCH REDUCTION;

INFRARED DETECTORS;

EID: 3042797355     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-004-0068-z     Document Type: Conference Paper

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