Formation and interface analysis of TiNiTiAu ohmic contacts on n -type 6H-SiC

Journal of the Electrochemical Society

Volumn 154, Issue 10, 2007, Pages

  Lee, J W ^a   Angadi, Basavaraj ^a,c   Park, H C ^a   Park, D H ^a   Choi, J W ^a   Choi, W K ^a   Kim, T W ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Hanyang University   (South Korea)

^c BANGALORE UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; OHMIC CONTACTS; SILICON CARBIDE; THERMODYNAMICS; X RAY DIFFRACTION;

INTERFACE EVOLUTION; MULTILAYER OHMIC CONTACTS; THERMODYNAMIC REACTIONS;

TITANIUM COMPOUNDS;

EID: 34548201853     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2761526     Document Type: Article

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