The effects of mechanical thin-film properties on the pyroelectric signals

Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007

Volumn , Issue , 2007, Pages 337-341

  Wei, Chung Sheng ^a   Hsiao, Chun Ching ^a   Hu, Yuh Chung ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b HUAFAN UNIVERSITY   (Taiwan)

Author keywords

Mechanical property; Nanoindentation; Pyroelectric sensor; ZnO

Indexed keywords

ELECTRIC POTENTIAL; PYROELECTRICITY; SCANNING ELECTRON MICROSCOPY; SENSORS; SPUTTERING; SURFACE MORPHOLOGY; ZINC OXIDE;

PYROELECTRIC SENSORS; PYROELECTRIC SIGNALS;

THIN FILMS;

EID: 34548120218     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2007.352014     Document Type: Conference Paper

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