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Volumn 30, Issue 7, 2004, Pages 1847-1850
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Computer simulation of temperature field of multilayer pyroelectric thin film IR detector
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Author keywords
ANSYS; Finite element modeling; Porous silica film; Pyroelectric thin film IR detector; Temperature field
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Indexed keywords
COMPUTER SIMULATION;
ELECTRIC SIGNAL SYSTEMS;
ELECTRODES;
FINITE ELEMENT METHOD;
HEAT CONDUCTION;
HEAT LOSSES;
INFRARED DETECTORS;
MATHEMATICAL MODELS;
MULTILAYERS;
PHOTOLITHOGRAPHY;
POROUS SILICON;
PYROELECTRICITY;
SPIN COATING;
SPUTTERING;
THERMAL CONDUCTIVITY;
ANSYS;
FINITE ELEMENT MODELING;
POROUS SILICA FILMS;
PYROELECTRIC EFFECTS;
PYROELECTRIC THIN FILM IR DETECTORS;
TEMPERATURE FIELDS;
THERMAL-INSULATION LAYERS;
THIN FILMS;
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EID: 4344623422
PISSN: 02728842
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ceramint.2003.12.057 Document Type: Conference Paper |
Times cited : (25)
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References (6)
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