Substrates effects on the properties of the pyroelectric thin film IR detectors

Sensors and Actuators, A: Physical

Volumn 93, Issue 2, 2001, Pages 117-122

  Ko, Jong Soo ^a   Liu, Weiguo ^a   Zhu, Weiguang ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

IR detector; Micro machining; PZT thin film; Sol gel process

Indexed keywords

ELECTRIC CURRENT MEASUREMENT; LEAD COMPOUNDS; PLATINUM; PYROELECTRICITY; SILICA; SILICON NITRIDE; SILICON WAFERS; SOL-GELS; SUBSTRATES; THIN FILMS; TITANIUM; VOLTAGE MEASUREMENT;

PYROELECTRIC THIN FILM; SUBSTRATE EFFECT;

INFRARED DETECTORS;

EID: 0035975599     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00643-4     Document Type: Article

References (9)

1. 3 thin films grown on the Pt electrodes with a percolating network structure
2. Pyroelectric thin-film sensor array
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4. Infrared imaging with ferroelectrics
5. Pyroelectric IR-detector arrays based on sputtered PZT and spin-coated P(VDF/TRFE) thin films
6. A thermoelectric infrared radiation sensor with monolithically integrated amplifier stage and temperature sensor
7. 3 thin films
8. 3 thin films for microsensor applications
9. Influences of thin Ni layer on the electrical and absorption properties of PZT thin film pyroelectric IR sensors