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Volumn 45, Issue 37-41, 2006, Pages
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Development of high-angular-resolution microdiffraction system for reciprocal space map measurements
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Author keywords
High resolution diffraction; Reciprocal space map; SiGe; Strain; X ray microdiffraction; Zone plate
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Indexed keywords
OPTICAL RESOLVING POWER;
SEMICONDUCTING SILICON COMPOUNDS;
STRAIN;
X RAY DIFFRACTION ANALYSIS;
HIGH-RESOLUTION DIFFRACTION;
RECIPROCAL SPACE MAP;
X-RAY MICRODIFFRACTION;
ZONE PLATE;
OPTICAL SYSTEMS;
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EID: 34547842706
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.45.L1054 Document Type: Article |
Times cited : (32)
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References (10)
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