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Volumn 45, Issue 37-41, 2006, Pages

Development of high-angular-resolution microdiffraction system for reciprocal space map measurements

Author keywords

High resolution diffraction; Reciprocal space map; SiGe; Strain; X ray microdiffraction; Zone plate

Indexed keywords

OPTICAL RESOLVING POWER; SEMICONDUCTING SILICON COMPOUNDS; STRAIN; X RAY DIFFRACTION ANALYSIS;

EID: 34547842706     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.L1054     Document Type: Article
Times cited : (32)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.