High-resolution X-ray Microdiffraction System for Characterization of Selectively Grown Layers using a Zone Plate Combined with a Narrow Slit

AIP Conference Proceedings

Volumn 705, Issue , 2004, Pages 1275-1278

  Kimura, Shigeru ^a   Kagoshima, Yasushi ^b   Koyama, Takahisa ^b   Wada, Izumi ^b   Niimi, Toshihiro ^b   Tsusaka, Yoshiyuki ^b   Matsui, Junji ^b   Izumi, Koich ^c  

^a JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

^c NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85012241603     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1758033     Document Type: Conference Paper

References (8)

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