Stresses in pulsed laser deposited cubic boron nitride films

Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1276-1280

  Reisse, Guenter ^a   Weissmantel, Steffen ^a   Rost, Dirk ^a  

^a UNIVERSITY OF APPLIED SCIENCES MITTWEIDA   (Germany)

Author keywords

Cubic boron nitride (CBN); Mechanical stress; Nitrides; Pulsed laser deposition

Indexed keywords

ADHESION; FILM GROWTH; FILM PREPARATION; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; KINETIC ENERGY; NUCLEATION; PULSED LASER DEPOSITION; STRESS ANALYSIS; SUBSTRATES;

BORON NITRIDE FILMS;

CUBIC BORON NITRIDE;

BORON NITRIDE;

EID: 0036508186     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00035-3     Document Type: Article

References (13)