Structure and mechanical properties of Al/AlN multilayer with different AlN layer thickness

Applied Surface Science

Volumn 253, Issue 5, 2006, Pages 2733-2738

  Wu, Z G ^a,b   Zhang, G A ^a   Wang, M X ^a   Fan, X Y ^a   Yan, P X ^a,c   Xu, T ^c  

^a LANZHOU UNIVERSITY   (China)

^b GANSU UNIVERSITY OF TECHNOLOGY   (China)

^c LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Al AlN multilayer; dc magnetron sputtering; Mechanical properties; Structure; Tribology

Indexed keywords

ALUMINUM NITRIDE; FRICTION; HARDNESS; MAGNETRON SPUTTERING; MOLECULAR STRUCTURE; TRIBOLOGY; X RAY DIFFRACTION;

GRAZING ANGLE XRD (GAXRD); LAYER THICKNESS; MULTILAYER HARDNESS; NANOINDENTATION;

MULTILAYERS;

EID: 33751437830     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.05.039     Document Type: Article

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