Wafer-level process for single-use buckling-film microliter-range pumps

Journal of Microelectromechanical Systems

Volumn 16, Issue 4, 2007, Pages 795-801

  Samel, Björn ^a   Chretien, Julien ^a,b   Yue, Ruifeng ^a,c   Griss, Patrick ^a,d   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b Nordon Cryogénie ^*  (France)

^c TSINGHUA UNIVERSITY   (China)

^d ZÜHLKE ENGINEERING AG   (Switzerland)

Author keywords

Fabrication; Fluidics; Micropumps; Wafer scale integration

Indexed keywords

ACTUATORS; BENDING (DEFORMATION); BUCKLING; COMPOSITE FILMS; MICROSPHERES; PUMPS; TEMPERATURE; WSI CIRCUITS;

COMPOSITE ACTUATORS; MICROLITER-RANGE PUMPS; WAFER-LEVEL FABRICATION SCHEME;

MICROFLUIDICS;

EID: 34547684912     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.901642     Document Type: Article

References (25)

1. D. J. Harrison and A. V. D. Berg, Eds., Micro Total Analysis Systems 98, Dordrecht, The Netherlands: Kluwer, 1998.
2. A. Manz and H. Becker, Eds., Microsystem Technology in Chemistry and Life Sciences, Topics in Current Chemistry 194. Berlin, Germany: Springer-Verlag, 1998.
3. P.-A. Auroux, D. Iossifidis, D. R. Reyes, and A. Manz, "Micro total analysis systems. 2. Analytical standard operations and applications," Anal. Chem., vol. 74, no. 12, pp. 2637-2652, Jun. 2002.
4. A. van den Berg and T. Lammerink, Microsystem Technology in Chemistry and Life Sciences, Topics in Current Chemistry 194. Berlin, Germany: Springer-Verlag, 1998, ch. Micro Total Analysis Systems: Microfluidic Aspects, Integration Concept and Applications, pp. 21-49.
5. S. Shoji and M. Esashi, "Microflow devices and systems," J. Micromech. Microeng., vol. 4, no. 4, pp. 157-171, 1994.
6. H. Andersson, W. van der Wijngaart, P. Nilsson, P. Enoksson, and G. Stemme, "Valve-less diffuser micropump for microfluidic analytical systems," Sensors Actuators B, Chem., vol. 72, no. 3, pp. 259-265, Feb. 2001.
7. M. A. Unger, H.-P. Chou, T. Thorsen, A. Scherer, and S. R. Quake, "Monolithic microfabricated valves and pumps by multilayer soft lithography," Science, vol. 288, no. 5463, pp. 113-116, Apr. 2000.
8. R. F. Ismagilov, D. Rosmarin, P. J. A. Kenis, D. T. Chiu, W. Zhang, H. A. Stone, and G. M. Whitesides, "Pressure-driven laminar flow in tangential microchannels: An elastomeric microfluidic switch," Anal. Chem., vol. 73, no. 19, pp. 4682-4687, Oct. 2001.
9. R. Liu, Q. Yu, and D. Beebe, "Fabrication and characterization of hydrogel-based microvalves," J. Microelectromech. Syst., vol. 11, no. 1, pp. 45-53, Feb. 2002.
10. C. Yu, S. Mutlu, P. Selvaganapathy, C. Mastrangelo, F. Svec, and J. Frechet, "Flow control valves for analytical microfluidic chips without mechanical parts based on thermally responsive monolithic polymers," Anal. Chem., vol. 75, no. 8, pp. 1958-1961, Apr. 2003.
11. D. Duffy, H. Gillis, J. Lin, N. Sheppard, and G. Kellogg, "Microfabricated centrifugal microfluidic systems: Characterization and multiple enzymatic assays," Anal. Chem., vol. 71, no. 20, pp. 4669-4678, 1999.
12. S. Bohm, W. Olthuis, and P. Bergveld, "An integrated micromachined electrochemical pump and dosing system," Biomed. Microdevices, vol. 1, no. 2, pp. 121-130, 1999.
13. J. Munyan, H. Fuentes,M. Draper, R. Kelly, and A.Woolley, "Electrically actuated, pressure-driven microfluidic pumps," Lab Chip, vol. 3, no. 4, pp. 217-220, 2003.
14. Y. H. Choi, S. Son, and S. S. Lee, "Novel micropump using oxygen as pumping source," in Proc. MEMS, 2003, pp. 116-119.
15. C.-C. Hong, S. Murugesan, S. Kim, G. Beaucage, J.-W. Choi, and C. Ahn, "A functional on-chip pressure generator using solid chemical propellant for disposable lab-on-a-chip," Lab Chip, vol. 3, no. 4, pp. 281-286, Nov. 2003.
16. E. Carlen and C. Mastrangelo, "Electrothermally activated paraffin microactuators," J. Microelectromech. Syst., vol. 11, no. 3, pp. 165-174, Jun. 2002.
17. X. Yang, C. Grosjean, Y.-C. Tai, and C.-M. Ho, "A MEMS thermopneumatic silicone rubber membrane valve," Sens. Actuators A, Phys., vol. A64, no. 1, pp. 101-108, Jan. 1998.
18. C. Cooney and B. Towe, "A thermopneumatic dispensing micropump," Sens. Actuators A, Phys., vol. A116, no. 3, pp. 519-524, Oct. 2004.
19. P. Griss, H. Andersson, and G. Stemme, "Expandable microspheres for the handling of liquids," Lab Chip, vol. 2, no. 2, pp. 117-120, May 2002.
20. B. Samel, P. Griss, and G. Stemme, "A thermally responsive PDMS composite and its microfluidic applications," J. Microelectromech. Syst., vol. 16, no. 1, pp. 50-57, Feb. 2007.
21. B. Samel, V. Nock, A. Russom, P. Griss, and G. Stemme, "A disposable lab-on-a-chip platform with embedded fluid actuators for active nanoliter liquid handling," Biomed. Microdevices, vol. 9, no. 1, pp. 61-67, Feb. 2007.
22. J. McDonald and G. Whitesides, "Poly(dimethylsiloxane) as a material for fabricating microfluidic devices," Acc. Chem. Res., vol. 35, no. 7, pp. 491-499, Jul. 2002.
23. B.-H. Jo, L. Van Lerberghe, K. Motsegood, and D. Beebe, "Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer," J. Microelectromech. Syst., vol. 9, no. 1, pp. 76-81, Mar. 2000.
24. D. Ross, M. Gaitan, and L. E. Locascio, "Temperature measurement in microfluidic systems using a temperature-dependent fluorescent dye," Anal. Chem., vol. 73, no. 17, pp. 4117-4123, Sep. 2001.
25. N. Roxhed, B. Samel, L. Nordquist, P. Griss, and G. Stemme, "Painless drug delivery through microneedle-based transdermal patches featuring active infusion," IEEE Trans. Biomed. Eng. submitted for publication.