Novel micropump using oxygen as pumping source

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 116-119

  Choi, Yo Han ^a   Son, Sanguk ^a   Lee, Seung S ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CATALYSTS; DECOMPOSITION; HYDROGEN PEROXIDE; HYDROLYSIS; MANGANESE COMPOUNDS; MELTING; OXYGEN; PARAFFINS; PUMPS; SEPARATION; WATER;

MANGANESE DIOXIDE; MICROHEATER; MICROPUMP;

MICROELECTROMECHANICAL DEVICES;

EID: 0037818337     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. D. B. Young, T. E. Jackson, D. H. Pearce, and A. C. Guyton, "IEEE Transducers on Biomedical Engineering", vol. BME-24 (1997) 543-545.
2. Y. H. Bae, I. C. Kwon, and Insutech, Inc., U.S. patent number 5,354,264, (1994).
3. H. C. Kim, Y. H. Bae, and S. W. Kim, "IEEE Transducers on Biomedical Engineering", vol. 46, no. 6 (1999) 663-669.
4. E. T. Carlen and C. H. Mastrangelo, "Journal of Microelectromechanical System", vol. 11, no. 3 (2002) 165-174.