Development of latching type large vertical-travel microactuator

Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005

Volumn PART C, Issue , 2006, Pages 1755-1759

  Toda, Risaku ^a   Yang, Eui Hyeok ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POST-FABRICATION; PZT ACTUATORS;

DIES; ELECTROSTATIC DEVICES; SILICON WAFERS;

MICROACTUATORS;

EID: 32844470355     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. S. N. Gullapalli, E. H. Yang and S. -S. Lih, "New technologies for the actuation and control of large aperture lightweight optical quality mirrors," IEEE Aerospace Conference, Big Sky, Montana, Volume 4, pp. 1717-1728, 2003.
2. R. Yeh, S. Hollar, K. S. J. Pister, "Single Mask, Large Force, and Large Displacement Electrostatic Linear Inchworm Motors", MEMS 01, Interlaken, Switzerland, Jan. 21-25, pp. 260-264, 2001.
3. Q. Chen, D. J. Yao, C. J. Kim, G. P. Carman, "Mesoscale Actuator Device with Micro Interlocking Mechanism", MEMS 98, Heidelberg, Germany, pp. 384-389, 1998.
4. H. N. Kwon, J. H. Lee, "Characterization of a Micromachined Inchworm Motor with Thermoelastic Linkage Actuators" MEMS 02, Las Vegas, pp. 586-593, 2002.
5. M. P. de Boer, D. L. Luck, W. R. Ashurst, R. Maboudian, A. D. Corwin, J. A. Walraven, and J. M. Redmond. "High-Performance Surface-Micromachined Inchworm Actuator," Journal of Microelectromechanical Systems, Vol. 13, pp. 63-74, 2004.
6. R. Toda, E. H. Yang, "Fabrication and characterization of vertical travel linear microactuator", ASME IMECE'04, Anaheim, CA, 2004.