Electrostatic inchworm microsystem with long range translation

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 379-386

  Shutov, Mikhail V ^a   Howard, Dwight L ^a   Sandoz, Eric E ^a   Sirota, J M ^b   Smith, R L ^c   Collins, S D ^c  

^a University of California   (United States)

^b UNIVERSITY OF MARYLAND BALTIMORE COUNTY   (United States)

^c UNIVERSITY OF MAINE   (United States)

Author keywords

Actuator; Electrostatic; Inchworm; Microsystem

Indexed keywords

AMPLIFICATION; CAPACITORS; CLAMPING DEVICES; COUPLED CIRCUITS; ELECTRIC POTENTIAL; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; OPTICAL RESOLVING POWER; OSCILLATIONS;

INCHWORM; LONG RANGE TRANSLATION; MICROSTAGE; MICROSYSTEM;

ELECTROSTATIC ACTUATORS;

EID: 4344564614     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.12.022     Document Type: Article

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