Microfluidic encapsulated nanoelectromechanical resonators

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 4, 2007, Pages 1171-1174

  Aubin, Keith L ^a   Huang, Jingqing ^a   Park, Seung Min ^a   Yang, Yanou ^a   Kondratovich, Marianna ^a   Craighead, Harold G ^a   Ilic, Bojan R ^b  

^a Cornell University   (United States)

^b Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; DNA; ENCAPSULATION; MEMS; MICROFLUIDICS; NEMS; PROTEINS;

HYBRIDIZATION; MASS DETECTORS; SUBATTOGRAM;

RESONATORS;

EID: 34547586497     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2746333     Document Type: Article

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