A silicon microvalve with combined electromagnetic/electrostatic actuation

Sensors and Actuators: A. Physical

Volumn 37-38, Issue C, 1993, Pages 684-692

  Bosch, D ^a   Heimhofer, B ^a   Muck G ^a   Seidel, H ^a   Thumser, U ^a   Welser, W ^a  

^a AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROSTATICS; FLOW CONTROL; GAS DYNAMICS; MAGNETOELECTRIC EFFECTS; MICROMACHINING; PRESSURE MEASUREMENT; SILICON SENSORS; TRANSDUCERS; VALVES (MECHANICAL);

DEFLECTABLE SILICON MEMBRANE; ELECTROMAGNETIC/ELECTROSTATIC ACTUATION; GAS FLOW INLET; SILICON MICROVALVE;

MICROELECTRONIC PROCESSING;

EID: 0027617564     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)80116-X     Document Type: Article

References (13)

1. A pressure-balanced electrostatically-actuated microvalve
2. Micromachined silicon microvalve
3. Microfabricated actuator with moving permanent magnet
4. The design and fabrication of a magnetically actuated micromachined flow valve
5. Integrated micro flow control systems
6. A piezoelectric micropump based on micromachining of silicon
7. A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices
8. Micromachined thermoelectrically driven cantilever structures for fluid jet deflection
9. Tuning forks in silicon
10. Anodic bonding of silicon chips using sputter-deposited Pyrex 7740 thin films