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Volumn 54, Issue 1-3, 1996, Pages 760-764

Bending and expanding motion actuators

Author keywords

Multilayer structures; Piezoelectric actuators

Indexed keywords


EID: 0042290981     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80053-2     Document Type: Article
Times cited : (32)

References (8)
  • 3
    • 0027927614 scopus 로고    scopus 로고
    • RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets
    • T. Abe and M.L. Reed, RF-magnetron sputtering of piezoelectric lead-zirconate-titanate actuator films using composite targets, MEMS '94, Oiso, Japan, 1994, p. 164.
    • MEMS '94, Oiso, Japan, 1994 , pp. 164
    • Abe, T.1    Reed, M.L.2
  • 4
    • 0026227258 scopus 로고
    • 3 thin films deposited by reactive sputtering
    • 3 thin films deposited by reactive sputtering, Jpn. J. Appl. Phys., 30 (1991) 2159-2162.
    • (1991) Jpn. J. Appl. Phys. , vol.30 , pp. 2159-2162
    • Hase, T.1    Shiosaki, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.