Stainless steel-based integrated mass-flow controller for reactive and corrosive gases

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 33-38

  Hirata, Kaoru ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

AlN; Flow control valve; Flow sensor; Mass flow controller; Stainless steel

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; CHLORINE; FEEDBACK CONTROL; FLOW CONTROL; FLOW OF FLUIDS; STAINLESS STEEL;

CORROSIVE GASES; FLOW CONTROL VALVE; MASS-FLOW CONTROLLER; PIEZO VALVE ACTUATOR; THERMAL FLOW SENSOR;

SENSORS;

EID: 0036544170     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00806-8     Document Type: Conference Paper

References (9)

1. The fabrication of integrated mass flow controllers
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4. High-precision, high-performance mass-flow sensor with integrated linear flow micro-channels
5. A highly sensitive silicon chip microtransducers for air flow and differential pressure sensing applications
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7. Pressure-based mass-flow controlling thermopneumatically-actuated microvalves
8. Development of an anti-corrosive integrated mass flow controller
9. Differential output type micro flow sensor