Effect of LP-buffer on the structure of ZnO thin films prepared on glass substrate using RF magnetron sputtering

Journal of Materials Science: Materials in Electronics

Volumn 18, Issue 10, 2007, Pages 1021-1025

  Xingwen, Zhu ^a   Yingwei, Li ^a   Yongqiang, Li ^a   Ji, Ma ^a   Yiben, Xia ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS SUBSTRATE; LOW POWER BUFFER; RF MAGNETRON SPUTTERING;

CRYSTAL LATTICES; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; SUBSTRATES; THIN FILMS;

ZINC OXIDE;

EID: 34547561789     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9273-x     Document Type: Article

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