Preparation of ZnO thin films with different preferential orientations using RF magnetron sputtering

Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

Volumn 29, Issue 2, 2007, Pages 204-206

  Lu, Ye ^a   Li, Yong Qiang ^a   Zhu, Xing Wen ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

(100) preferential orientation; (101) preferential orientation; RF magnetron sputtering method; ZnO thin film

Indexed keywords

EID: 34249307314     PISSN: 10042474     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)