Improvement of crystallinity of ZnO thin film and electrical characteristics of film bulk acoustic wave resonator by using Pt buffer layer

Vacuum

Volumn 74, Issue 3-4 SPEC. ISS., 2004, Pages 689-692

  Yamada, H ^a   Ushimi, Y ^a   Takeuchi, M ^a   Yoshino, Y ^a   Makino, T ^a   Arai, S ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

BAW; Buffer layer; Crystallinity; Electrical characteristics; Piezoelectric; ZnO

Indexed keywords

ACOUSTIC WAVES; AMORPHOUS FILMS; CRYSTALLIZATION; ELECTRODES; ELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; PLATINUM; RESONATORS; ZINC OXIDE;

ACOUSTIC WAVE RESONATORS; CRYSTALLINITY;

THIN FILMS;

EID: 2442419502     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.01.061     Document Type: Article

References (8)

1. Yoshino Y., Takeuchi M., Inoue K., Makino T., Arai S., Hata T. Vacuum. 66:2002;467.
2. Takeuchi M., Yamada H., Yoshino Y., Makino T., Arai S. Vacuum. 66:2002;463.
3. Kadota M., Minakata M. IEEE Trans Ultrasonics Ferroelectrics Frequency Control. 42:1995;345.
4. Yoshino Y., Takeuchi M., Inoue K., Makino T., Hata T. T IEE Japan. 120-E(12):2000;547.
5. Yoshino Y., Inoue K., Takeuchi M., Makino T., Katayama Y., Hata T. Vacuum. 59:2000;403.
6. Yoshino Y, Iwasa S, Aoki H, Deguchi Y, Yamamoto Y, Ohwada K, Mater Res Soc Symp Proc 1997; 441.
7. Tsuji T., Hirohashi M. Appl Surf Sci. 157:2000;47.
8. Lim W.T., Lee C.H. Thin Solid Films. 353:1999;12.