A micro-aperture electrostatic field mill based on MEMS technology

Journal of Electrostatics

Volumn 51-52, Issue 1-4, 2001, Pages 515-521

  Horenstein, Mark N ^a   Stone, Patrick R ^a  

^a Boston University   (United States)

Author keywords

Electrotastic field measurements; Field meter; Field mill; MEMS; Micro electromechanics; Resonant comb drive

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRIC FIELD MEASUREMENT; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

CHARGE SENSING ELECTRODE; ELECTROSTATIC FIELD MILLS;

ELECTRIC DISCHARGE MACHINING;

ELECTROSTATICS;

EID: 0035335012     PISSN: 03043886     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3886(01)00048-1     Document Type: Article

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