Micromachined magnetic-field sensor based on an electron tunneling displacement transducer

Sensors and Actuators, A: Physical

Volumn 86, Issue 1-2, 2000, Pages 8-20

  Dilella, D ^a   Whitman, L J ^a   Colton, R J ^a   Kenny, T W ^b   Kaiser, W J ^b   Vote, E C ^b   Podosek, J A ^b   Miller, L M ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TUNNELING; MAGNETIC FIELD EFFECTS; MICROELECTROMECHANICAL DEVICES; OPTICAL RESOLVING POWER; TRANSDUCERS;

DISPLACEMENT TRANSDUCERS; MAGNETIC FIELD SENSORS; TUNNEL SENSORS;

MICROSENSORS;

EID: 0034298199     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00303-4     Document Type: Article

References (34)

1. Kenny T.W., Kaiser W.J., Podosek J.A., Rockstad H.K., Reynolds J.K., Vote E.C. Micromachined tunneling displacement transducers for physical sensors. J. Vac. Sci. Technol., A. 11:1993;797-802.
2. Bocko M.F., Stephenson K.A., Koch R.H. Vacuum tunneling probe: a nonreciprocal, reduced-back-action transducer. Phys. Rev. Lett. 61:1988;726-729.
3. Bocko M.F., Stephenson K.A. Tunneling transducers: quantum limited displacement monitors at the nanometer scale. J. Vac. Sci. Technol., B. 9:1991;1363-1366.
4. Niksch M., Binnig G. Proposal for a novel gravitational-wave sensor. J. Vac. Sci. Technol., A. 6:1988;470-471.
5. Waltman S.B., Kaiser W.J. An electron tunneling sensor. Sens. Actuators. 19:1989;201-210.
6. Wandass J.H., Murday J.S., Colton R.J. Magnetic field sensing with magnetostrictive materials using a tunneling tip detector. Sens. Actuators. 19:1989;211-225.
7. Kenny T.W., Waltman S.B., Reynolds J.K., Kaiser W.J. Micromachined silicon tunnel sensor for motion detection. Appl. Phys. Lett. 58:1991;100-102.
8. Rockstad H.K., Kenny T.W., Reynolds J.K., Kaiser W.J., Gabrielson T.B. A miniature high-sensitivity broad-band accelerometer based on electron tunneling transducers. Sens. Actuators A. 43:1994;107-114.
9. Brizzolara R.A., Colton R.J., Wun-Fogle M., Savage H.T. A tunneling-tip magnetometer. Sens. Actuators. 20:1989;199-205.
10. Brizzolara R.A., Colton R.J. Magnetostriction measurements using a tunneling-tip strain detector. J. Magn. Magn. Mater. 88:1990;343-350.
11. Brizzolara R.A., Colton R.J. The magnetostriction of CoFeNiMo metallic glasses measured with a tunneling transducer. J. Magn. Magn. Mater. 103:1992;111-116.
12. Kenny T.W., Kaiser W.J., Waltman S.B., Reynolds J.K. Novel infrared detector based on a tunneling displacement transducer. Appl. Phys. Lett. 59:1991;1820-1822.
13. Kenny T.W., Reynolds J.K., Podosek J.A., Vote E.C., Miller L.M., Rockstad H.K., Kaiser W.J. Micromachined infrared sensors using tunneling displacement transducers. Rev. Sci. Instrum. 67:1996;112-128.
14. MacDonald N.C. Single crystal silicon nanomechanisms for scanned-probe device arrays. Technical Digest, IEEE Solid-State Sensor Actuator Workshop. 1992;1-5 IEEE, New York.
15. Yao J.J., Arney S.C., MacDonald S.C., MacDonald N.C. Fabrication of high frequency two-dimensional nanoactuators for scanned probe devices. J. Microelectromech. Syst. 1:1992;14-22.
16. Jiang J.C., Faynberg V., White R.C., Allen P.K. Fabrication of micromachined silicon tip transducer for tactile sensing. J. Vac. Sci. Technol., B. 11:1993;1962-1967.
17. Kobayashi D., Hirano T., Furuhata T., Fujita H. An integrated lateral tunneling unit. Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. 1992;214-219 IEEE, New York.
18. Witek A., Onn D.G. Proposal for a novel magnetometer. J. Vac. Sci Technol., B. 9:1991;639-642.
19. Fenn R.C., Gerver M.J., Hockney R.L., Johnson B.G., Wallace J.L. Microfabricated magnetometer using Young's modulus changes in magnetoelastic materials. Pro. SPIE - Int. Soc. Opt. Eng. 1694:1992;132-143.
20. Chmielowski M., Witek A. Tunneling thermometer. Sens. Actuators, A. 45:1994;145-151.
21. Yeh C.W., Najafi K. Bulk-silicon tunneling-based pressure sensors. Technical Digest, Solid-State Sensors and Actuators Workshop. 1994;201-204 Transducer Research Foundation, Cleveland Heights.
22. Binnig G., Quate C.F., Gerber Ch. Atomic force microscope. Phys. Rev. Lett. 56:1986;930-933.
23. Lee G.U., Kidwell D.A., Colton R.J. Sensing discrete streptavidin-biotin interactions with atomic force microscopy. Langmuir. 10:1994;354-357.
24. Lee G.U., Christy L.A., Colton R.J. Direct measurement of the forces between complementary strands of DNA. Science. 266:1994;771-773.
25. Kenny T.W., Kaiser W.J., Rockstad H.K., Reynolds J.K., Podosek J.A., Vote E.C. Wide-bandwidth electromechanical actuators for tunneling displacement transducers. J. MEMS. 3:1994;97-104.
26. Dubois L.H., Zegarski B.R., Nuzzo R.G. Molecular ordering of organosulfur compounds on Au(111) and Au(100): adsorption from solution and in ultrahigh vacuum. J. Chem. Phys. 98:1993;678-688.
27. Scott W.T. The Physics of Electricity and Magnetism. 1966;Wiley, New York.
28. Zijlstra H. Rev. Sci. Instrum. 41:1970;1241.
29. Gabrielson T.B. Mechanical-thermal noise in micromachined acoustic and vibration sensors. IEEE Trans. Electron. Devices. 40:1993;903-909.
30. 2. Ultramicroscopy. 42-44:1992;1317-1320.
31. Jaklevic R.C., Elie L. Scanning-tunneling-microscope observation of surface diffusion on an atomic scale: Au on Au(111). Phys. Rev. Lett. 60:1988;120-123.
32. Trevor D.J., Chidsey C.E.D. Room temperature surface diffusion mechanisms observed by scanning tunneling microscopy. J. Vac. Sci. Technol., B. 9:1991;964-968.
33. Stranick S.J., Kamna M.M., Krom K.R., Parikh A.N., Allara D.L., Weiss P.S. Scanning tunneling microscopy studies of self-assembled monolayers of alkanethiols on gold. J. Vac. Sci. Technol., B. 12:1994;2004-2007.
34. Joyce S.A., Thomas R.C., Houston J.E., Michalske T.A., Crooks R.M. Mechanical relaxation of organic monolayer films measured by force microscopy. Phys. Rev. Lett. 68:1992;2790-2793.