The number density of ground state atomic oxygen (O(3P 2)) measured in an inductively coupled plasma chamber by cavity enhanced absorption

Journal of Physics D: Applied Physics

Volumn 40, Issue 15, 2007, Pages 4515-4518

  Hancock, G ^a   Peverall, R ^a   Ritchie, G A D ^a   Thornton, L J ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CARRIER CONCENTRATION; CONTINUOUS WAVE LASERS; GROUND STATE; PLASMA THEORY; PRESSURE EFFECTS;

CAVITY ENHANCED ABSORPTION; CONTINUOUS WAVE DIODE LASERS; PRECURSOR GASES;

INDUCTIVELY COUPLED PLASMA;

EID: 34547446611     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/15/022     Document Type: Article

References (33)

1. Franklin R N 2001 J. Phys. D: Appl. Phys. 34 1834
2. Gudmundsson J T, Kouznetsov I G, Patel K K and Lieberman M A 2001 J. Phys. D: Appl. Phys. 34 1100
3. Kiehlbauch M W and Graves D B 2003 J. Vac. Sci. Technol. A 21 660
4. Yang W L and Wolden C A 2006 Thin Solid Films 515 1708
5. Langowski B A and Uhrich K E 2005 Langmuir 21 6366
6. Chan C M, Ko T M and Hiraoka H 1996 Surf. Sci. Reps. 24 3
7. Krastev V, Reid I, Galassi C, Hughes G and McGlynn E 2005 J. Mater. Sci. Mater. Electron. 16 541
8. Jasik J, Macko P, Martisovits V, Lukac P and Veis P 2004 Czech. J. Phys. 54 661
9. Booth J P, Joubert O, Pelletier J and Sadeghi N 1991 J. Appl. Phys. 69 618
10. Granier A, Chereau D, Henda K, Safari R and LePrince P 1994 J. Appl. Phys. 75 104
11. Nagai H, Hiramatsu K, Hori M and Goto T 2003 Rev. Sci. Instrum. 74 3453
12. Kitajima T, Noro K, Nakano T and Makabe T 2004 J. Phys. D: Appl. Phys. 37 2670
13. Celii F G, Thorsheim H R, Hanratty M A and Butler J E 1990 Appl. Opt. 29 3135
14. Collart E J H, Baggerman J A G and Visser R J 1991 J. Appl. Phys. 70 5278
15. Dilecce G, Vigliotti M and De Benedictis S 2000 J. Phys. D: Appl. Phys. 33 53
16. Peze P, Paillous A, Siffre J and Dubreuil B 1993 J. Phys. D: Appl. Phys. 26 1622
17. Hancock G and Toogood M J 1992 Appl. Phys. Lett. 60 35
18. Gomez S, Steen P G and Graham W G 2002 Appl. Phys. Lett. 81 19
19. Czerwiec T, Gavillet J, Belmonte T, Michel H and Ricard A 1998 Surf. Coat. Technol. 98 1411
20. Harris S J and Weiner A M 1981 Opt. Lett. 6 142
21. Teslja A and Dagdigian P J 2004 Chem. Phys. Lett. 400 374
22. Gupta M, Owano T, Baer D and O'Keefe A 2006 Appl. Phys. Lett. 89 241503
23. Berden G, Peeters R and Meijer G 2000 Int. Rev. Phys. Chem. 19 565
24. Mazurenka M, Orr-Ewing A J, Peverall R and Ritchie G A D 2005 Ann. Rep. Prog. Chem. C 101 100
25. Bakowski B, Hancock G, Peverall R, Ritchie G A D and Thornton L J 2004 J. Phys. D: Appl. Phys. 37 2064
26. NIST Atomic Spectra database version 3.0.3, www.nist.gov
27. Gudmundsson J T, Kimura T and Lieberman M A 1999 Plasma Sources Sci. Technol. 8 22
28. Lee C, Graves D B, Lieberman M A and Hess D W 1994 J. Electrochem. Soc. 141 1546
29. Pinheiro M J 1998 Plasma Sources Sci. Technol. 7 524
30. Svehla R A 1962 NASA Technical Report No R-132
31. Singh H, Coburn J W and Graves D B 2000 J. Appl. Phys. 88 3748
32. Bakowski B 2003 Laser studies of species in plasmas DPhil Thesis PTCL, Oxford University
33. Bakowski B, Hancock G, Peverall R and Ritchie G A D 2006 Appl. Phys. B 82 123