Time resolved actinometric study of pulsed RF oxygen discharge

Czechoslovak Journal of Physics

Volumn 54, Issue 6, 2004, Pages 661-676

  Jasik J ^a   Macko, P ^a   Martisovits V ^a   Lukac P ^a   Veis, P ^a  

^a Physics and Informatics   (Slovakia)

Author keywords

Actinometry; Oxygen atoms; Pulsed RF discharge; Pyrex

Indexed keywords

EID: 3042808908     PISSN: 00114626     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:CJOP.0000029694.21954.1d     Document Type: Article

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