Hydrogen and thermal deoxidations of InSb and GaSb substrates for molecular beam epitaxial growth

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 4, 2007, Pages 736-745

  Weiss, E ^a   Klin, O ^a   Grossman, S ^a   Greenberg, S ^a   Klipstein, P C ^a   Akhvlediani, R ^b   Tessler, R ^b   Edrei, R ^b   Hoffman, A ^b  

^a SCD Semiconductor Devices Ltd   (Israel)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; HYDROGEN; MOLECULAR BEAM EPITAXY; MONOLAYERS; SEMICONDUCTING INDIUM COMPOUNDS; THERMAL EFFECTS;

MOLECULAR HYDROGEN; MOLECULAR HYDROGEN CLEANING (MHC); THERMAL DEOXIDATIONS; THERMAL OXIDE DESORPTION;

THIN FILMS;

EID: 34547303311     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2746045     Document Type: Article

References (18)

1. P. C. Klipstein, E. Jacobsohn, O. Klin, M. Yassen, Z. Calahora, E. Weiss, S. Risemberg, and D. Rosenfeld, Proc. SPIE 4820, 653 (2002).
2. O. Klin, P. C. Klipstein, E. Jacobsohn, E. Saguy, I. Shtrichman, A. Raizman, and E. Weiss, J. Vac. Sci. Technol. B 24, 1607 (2006).
3. A. D. Johnson, G. M. Williams, A. J. Pidduck, C. R. Whitehouse, T. Martin, C. T. Elliott, and T. Ashley, Proceedings of the Seventh Int. Conf. Narrow-Gap Semiconductors, Santa Fe, 9-12 January 1995 (unpublished), p. 204.
4. G. R. Bell, N. S. Kaijaks, R. J. Dixon, and C. F. McConville, Surf. Sci. 401, 125 (1998).
5. R. Tessler, C. Saguy, O. Klin, S. Greenberg, E. Weiss, R. Akhvlediani, R. Edrei, and A. Hoffman, Appl. Phys. Lett. 88, 031918 (2006).
6. R. Tessler, R. Akhvlediani, R. Edrei, O. Klin, S. Greenberg, E. Weiss, C. Saguy, and A. Hoffman, J. Appl. Phys. 101, 024513 (2007).
7. Veeco Application Note, Recent Results Using the Atomic Hydrogen Source, March 1998 (unpublished).
8. K. Liu and M. B. Santos, Proceedings of the Seventh Int. Conf. Narrow-Gap Semiconductors, Santa Fe, 9-12 January 1995 (unpublished), p. 194.
9. W. K. Liu and M. B. Santos, J. Vac. Sci. Technol. B 14, 647 (1996).
10. L. J. Gomez Zazo, M. T. Montojo, L. J. Castano, and J. Piqueras, J. Electrochem. Soc. 136, 1480 (1989).
11. G. P. Schwartz, G. J. Gualtieri, J. E. Griffith, C. D. Thurmond, and B. Schwartz, J. Electrochem. Soc. 127, 2488 (1980).
12. Ch. Giesen, Thermophotovoltaic Generation of Electricity, AIP Conf. Proc. No. 738 (AIP, New York, 2004), p. 267.
13. K. Moeller, L. Toeben, Z. Kollonitsch, Ch. Giesen, M. Heuken, F. Willig, and T. Hannappel, Appl. Surf. Sci. 242, 392 (2005).
14. Y. Ide and M. Yamamda, J. Vac. Sci. Technol. A 12, 1858 (1994).
15. Z. Lu, Y. Jiang, W. I. Wang, M. C. Teich, and R. M. Osgood, Jr., J. Vac. Sci. Technol. B 10, 1856 (1992).
16. N. Razek, K. Otte, T. Chasś, D. Hirsch, A. Schindler, F. Frost, and B. Rauschenbach, J. Vac. Sci. Technol. A 20, 1492 (2002).
17. J. F. Klem, J. Y. Tsao, J. L. Reno, A. Dayte, and S. Chadda, J. Vac. Sci. Technol. A 9, 2996 (1996).
18. B. R. Bennett, R. Magno, and B. V. Shanabrook, Appl. Phys. Lett. 68, 505 (1996).