Molecular beam epitaxy grown In1-xAlx SbInSb structures for infrared detectors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 3, 2006, Pages 1607-1612

  Klin, O ^a   Klipstein, P C ^a   Jacobsohn, E ^a   Saguy, E ^a   Shtrichman, I ^a   Raizman, A ^b   Weiss, E ^a  

^a SCD Semiconductor Devices Ltd   (Israel)

^b SOREQ NUCLEAR RESEARCH CENTER   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION (PROCESS); MOLECULAR BEAM EPITAXY; PHOTODIODES; SEMICONDUCTING INDIUM COMPOUNDS; SILICON; STRAIN; SUBSTRATES;

AVERAGE DARK CURRENT; FOCAL PLANE ARRAY (FPA) TECHNOLOGY; MORPHOLOGICAL CROSSHATCH PATTERNS; NON-UNIFORMITY CORRECTION (NUC).;

INFRARED DETECTORS;

EID: 33744823542     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2190670     Document Type: Article

References (13)

1. P. C. Klipstein, E. Jacobsohn, O. Klin, M. Yassen, Z. Calahora, E. Weiss, S. Risemberg, and D. Rosenfeld, Proc. SPIE 4820, 653 (2002).
2. F. Fuchs, L. Bürkle, R. Hamid, N. Herres, W. Pletschen, R. E. Sah, R. Kiefer, and J. Schmitz, Proc. SPIE 4288, 171 (2001).
3. O. Nesher, P. C. Klipstein, and E. Weiss, Proc. SPIE 5359, 101 (2004).
4. P. C. Klipstein, Proc. SPIE 5406, 222 (2004).
5. W. K. Liu and M. B. Santos, J. Vac. Sci. Technol. B 14, 647 (1996).
6. R. Akhvlediani, R. Tessler, R. Edrei, O. Klin, S. Greenberg, E. Weiss, C. Saguy, and A. Hoffman, Appl. Phys. Lett. 88, 031918 (2006).
7. P. Maigne, M. W. C. Dharma-Wardana, D. J. Lockwood, and J. B. Webb, J. Appl. Phys. 77, 1466 (1995).
8. J. W. Matthews and A. E. Blakeslee, J. Cryst. Growth 27, 118 (1974).
9. Y. B. Bolkhovityanov, O. P. Pchelyakov, and S. I. Chikichev, Phys. Usp. 44, 655 (2001), and references therein.
10. J. W. Matthews and A. E. Blakeslee, J. Cryst. Growth 32, 265 (1976).
11. J. Toivonen, J. Mater. Sci.: Mater. Electron. 14, 267 (2003).
12. D. D. Perovic, B. Bahierathan, D. C. Houghton, H. Lafontaine, and J.-M. Barineay, MRS Symposia Proceedings No. 399 (Materials ResearchSociety, Pittsburgh, 1996), p. 325.
13. Y. P. Varshni, Physica (Amsterdam) 34, 149 (1967).