Thermal desorrotion of InSb surface oxides

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 9, Issue 6, 1991, Pages 2996-2998

  Klem, J F ^a   Tsao, J Y ^a   Reno, J L ^a   Datye, A ^b   Chadda, S ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84887488353     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.577162     Document Type: Article

References (7)

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